Precision displacement measurement
Leading nanoengineering at the cutting edge of manufacturing technology
To realize measurement of nano and subnano regions
As performance enhancements in digital equipment advances component miniaturization, ever-higher degrees of accuracy are now demanded even at production sites. Capacitance type sensors, which realize high stability and high resolution in precision displacement measurement indispensable to precision positioning of a 1nm order for manufacturing equipment and inspection equipment of semiconductors, liquid crystals and hard disks, are playing an active role at many production sites. For research and development requiring higher accuracy, fiber optic displacement sensors realize measurements having a high sensitivity of 0.04nm.
